IEC 60204-33:2009

 
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IEC 60204-33:2009

Title
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
Abstract
IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
Issue date
2009-12-10
Category
HOUS,INDA
Included in IECEE System
2014-04-22
Test Report Form
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